- Primary category
- Electronics & Electronic Materials
- Product Family
- Electronic Surface & Coupling Materials
Product overview
Hexamethyldisilazane (HMDS) is a moisture-sensitive organosilicon reagent used as a photoresist adhesion promoter, wafer-surface treatment agent and silylation reagent. Electronic use requires a validated high-purity grade with controlled water, metals, particles and nonvolatile residue.
Function & Usage
- Applications
Provides functional performance in the following evaluated uses: Photoresist adhesion promotion, Silicon-wafer dehydration and surface priming, Silylation in specialty synthesis, Analytical derivatization and chromatography. Final suitability depends on grade, formulation testing and destination-market requirements.
Product information
- Applications:
- Photoresist adhesion promotion, Silicon-wafer dehydration and surface priming, Silylation in specialty synthesis, Analytical derivatization and chromatography
- Hazard / Transport:
- Highly flammable, moisture-reactive and corrosive; harmful or toxic exposure classifications may apply. Commercial transport is commonly assigned UN 2924, Class 3 with subsidiary Class 8; confirm the exact shipping description and packing group from the supplied SDS. Any UN number, hazard class or packing group applies only when confirmed for the quoted concentration and physical form in the current grade-specific SDS.
- Storage:
- Store tightly sealed under dry inert gas in a cool, dry and well-ventilated flammable-liquid area. Exclude moisture and keep away from acids, oxidizers, heat, sparks and open flames.